我們的優(yōu)勢(shì)是歐美進(jìn)口備件配件，所有進(jìn)口的冷門的停產(chǎn)的或者你們找不到

的產(chǎn)品都可以來(lái)找我！

美國(guó)西門子ITE全系列、EATON電機(jī) 斷路器  接觸器 變壓器 、 GE電氣 斷路

器 接觸器 變壓器 、 Cutler-Hammer（卡特拉-漢莫）、艾默生電機(jī)、PQ、 

VERSA  這些品牌我們價(jià)格都很美好。

歡迎前來(lái)詢價(jià)！


廈門紀(jì)揚(yáng)科技有限公司是一家以工業(yè)自動(dòng)化為主營(yíng)，融科、工、貿(mào)于一體，

專業(yè)從*工業(yè)自動(dòng)化工程項(xiàng)目設(shè)計(jì)、安裝、調(diào)試等服務(wù)和*銷售各類進(jìn)口**

電氣及自動(dòng)化產(chǎn)品的民營(yíng)高新技術(shù)企業(yè)。綜合型的工程技術(shù)服務(wù)型單位，是

國(guó)內(nèi)專業(yè)的電氣產(chǎn)品分銷商及工業(yè)自動(dòng)化系統(tǒng)集成商。









主營(yíng)：世界知名品牌的PLC 、DCS 系統(tǒng)備件 模塊

①Allen-Bradley(美國(guó)AB)系列產(chǎn)品》

②Schneider(施耐德電氣)系列產(chǎn)品》

③General electric(通用電氣)系列產(chǎn)品》

④Westinghouse（美國(guó)西屋）系列產(chǎn)品》

⑤SIEMENS(西門子系列產(chǎn)品)》

⑥銷售ABB Robots. FANUC Robots、YASKAWA Robots、KUKA Robots、Mitsubishi Robots、OTC Robots、Panasonic Robots、MOTOMAN Robots。

⑦estinghouse（西屋）： OVATION系統(tǒng)、WDPF系統(tǒng)、MAX1000系統(tǒng)備件。

⑧Invensys Foxboro（福克斯波羅）：I/A Series系統(tǒng)，F(xiàn)BM（現(xiàn)場(chǎng)輸入/輸出模塊）順序控制、梯形 邏輯控制、事故追憶處理、數(shù)模轉(zhuǎn)換、輸入/輸出信號(hào)處理、數(shù)據(jù)通信及處理等。Invensys Triconex: 冗余容錯(cuò)控制系統(tǒng)、基于三重模件冗余（TMR）結(jié)構(gòu)的zui現(xiàn)代化的容錯(cuò)控制器。

⑨Siemens(西門子)：Siemens MOORE， Siemens Simatic C1，Siemens數(shù)控系統(tǒng)等。

⑩Bosch Rexroth（博世力士樂(lè)）：Indramat，I/O模塊,PLC控制器,驅(qū)動(dòng)模塊等。

◆Motorola（摩托羅拉）：MVME 162、MVME 167、MVME1772、MVME177等系列。




























0020-22412 UPPER COVER  SLIT VALVE BELLOWS  
0020-22413 LOWER COVER  SLIT VALVE BELLOWS  
0020-22463 HARD STOP FROG LEG ROBOT  
0020-22482 BRACKET  DOOR MAG RIGHT  
0020-22547 ADAPTER 11 3" SOURCE WIDE BODY CHAMBER  
0020-22738 OBS: PLATbbbb  
0020-22739 CASSETTE SUPPORT  
0020-22813 DUMMY WAFER 8"  
0020-22898 OBS  COVER DISC  
0020-22910 BASIC BELLOWS  
0020-22948 SIDE RECIEVER  LEFT  
0020-22949 SIDE RECIEVER  RIGHT  
0020-22983 BRACKET PILLOW BLOCK  
0020-22993 PLATE COVER COHERENT 8" CHAMBER 16"  
0020-22996 ACTIVATOR PIN  6"ALL  
0020-23007 END PLATE  6" AUTO LOADLOCK  
0020-23021 CAPACITOR bbbbb  
0020-23031 CAM LEFT INBOARD  
0020-23034 BRACKET GUIDE  FRONT PANEL DOOR  PVD  
0020-23035 CAM  RIGHT INBOARD  
0020-23042 ADAPTER SOURCE 13"  
0020-23060 BRACKET  MOUNTING  SENSOR  FLAG  
0020-23064 REFLECTOR  SENSOR  FLAG  
0020-23095 BRACKET  A L L  CASSETTE SENSOR 200MM  
0020-23138 BRACKET SENSOR  A L L  CASSETTE SENSOR 200MM  
0020-23165 BRACKET CONNECTOR  A L L  CASSETTE SENSOR 200MM  
0020-23184 CONNECTING ROD  
0020-23209 LIFT HOOP 8"WIDE BODY 101% COVERAGE  
0020-23229 SUPPORT RIGHT  
0020-23230 SUPPORT LEFT  
0020-23231 BRACKET RIGHT  125MM CASSETTE  
0020-23232 BRACKET LEFT  125MM CASSETTE  
0020-23350 SHIELD RF HEATER TOP MTRZD LEFT  
0020-23441 BRACKET PLUMBING MOTORIZED LFT  
0020-23442 COVER PLUMBING MOTORIZED LFT  
0020-23559 MAGNET HOLDER  
0020-23591 TUBE  5"/6"/8"  
0020-23593 PLATE  6" CCD VACUUM SEAL  REVISED  
0020-23594 PLATE  8" CCD VACUUM SEAL REVISED  
0020-23644 MNT SENSOR MOUNT  
0020-23710 COVER CABLES BULKHEAD CENTURA  
0020-23764 SUPPORT  
0020-23783 OBS-BRKT PRESSURE SWTCH MNT CENTURA MF  
0020-23834 BRACKET D-CONN PNEU MANIFOLD CENTURA  
0020-24236 CLIP SPRING PC II ANTENNA DOWELL  
0020-24272 6" JMF TIN/SST CLAMP RING  
0020-24293 SIDE RECIEVER bbbbL CASSETTE  
0020-24319 CLAMP  2" & 1 5" PIPE  
0020-24386 COVER RING 6" 101 SST/ MATL  
0020-24387 PEDESTAL 6" 101 SST/MATL  
0020-24410 BRACKET INTERLOCK CATHODE LIFT  
0020-24719 COVER RING 8" 101 AL COVERAGE  
0020-24727 PLATE  SPACER 101%  
0020-24741 BRKT/GFI SNSR MTG CENTURD  
0020-24866 SHIELD 8" 101/COH TI LOWER  
0020-24877 SP SIDE RECEIVER  
0020-24878 SP SIDE RECEIVER (W/GROOVE)  
0020-24885 SP WEIGHT SUPPORT  
0020-24969 COVER WAFER MAP LED  
0020-25156 END BRACKET bbbbL CASSETTE  
0020-25551 MAIN EXHAUST BRACKET  
0020-25670 SHIELD 6" SMF AL 8" SRC  
0020-25787 CAP PIVOT ARM DUAL ROBOT  
0020-25917 ISOLATOR DC BIAS SHUTTER  
0020-26289 SHIELD LOWER 6" 101 DURA TTN  
0020-26310 SHIELD LOWER 6" CLMPD SPPRT LESS DURA  
0020-26312 SHIELD UPPER 8" DURASOURCE TTN SST  
0020-26686  
0020-26723 PLATE  BALL TRANSFER LOAD DIST  
0020-27127 PEDESTAL  PCII 8" JMF @ C&D  
0020-27193 SHIELD - PLENUM CAP - 300MM REFLEXION  
0020-27383 BRACKET  PNEUMATIC MANIFOLD COVER  
0020-27804 PEDESTAL  A101 HI-PWR POIS COH-TITIN  
0020-28064 CLAMP RING 6" SMLMF HOT AL 6 PADS TI  
0020-28367 SHIELD 6" HTHU AL/TI LOW KNEE  46" TRGT  
0020-28800 DISK  8" ADV 101  SST  SHUTTER  JMF  
0020-28995 CLAMP RING 6" SMLMF SST E/E 2 7MM  
0020-29300 CLAMP RING FUJITSU 8" SNNF TI 10402ARS W  
0020-29350 COVER SHIPMENT PACKAGING VECTRA-IMP FEED  
0020-29944 CUP  INNER  COIL SPRT  1/4 THK  CU  
0020-30084 COVER  FRONT  THROTTLE VALVE  
0020-30108 SHIELD CLAMP  ALUMINUM  100 THRU 200MM COMMON SIL  
0020-30110 COLLIMATOR OUTER 200MMBW  
0020-30115 COVER  GEAR  
0020-30195 COVER TOP bbbbL ETCH CHMBR  
0020-30198 TUBE  EXTERNAL  TAPERED  EXT CATHODE  
0020-30223 PLATE GAS DISTRIBUTION 133 HOLES  
0020-30286 PERF PLATE ENHANCED CONV SILANE NITRIDE  
0020-30290 GAS MANIFOLD  
0020-30291 H2O MANIFOLD  
0020-30335 HOUSING  QUARTZ TUBE SACVD  
0020-30338 SEAL  THROTTLE VALVE SACVD  
0020-30347 CYLINDER  EXTERNAL  
0020-30356 ELBOW GAS SUPPLY  EGEC  
0020-30357 PLUG  DIST PLATE  PROCESS GAS  EGEC  
0020-30406 PERF PLATE 150MM BW  
0020-30407 PERF  PLATE 200MM BW  
0020-30447 PLATE BLOCKER "SX" 6 IN  
0020-30482 COUPLING FLEX 8" OXIDE  
0020-30509 PLATE  Gas Box  
0020-30511 MANIFOLD  Water  
0020-30570 PLATE GAS DIST  150MM HEWEB  
0020-30679 CYLINDER  CLAMPING POLY/WSI 150MM  
0020-30681 MANIFOLD  bbbbb SACVD  
0020-30701 INSERT POLYSULFONE OX/MLR/NIT 150MM  
0020-30707 COVER  ELECTRICAL  H20 VDSII  
0020-30797 PERF PLATE  COMMON SILANE  200MM  
0020-30918 TOOL CENTERING 200MM SUS/ HOOP BSE BWCVD  
0020-30983 PLATE  TOP  CHMBR  PRSP  
0020-31016 HOUSING  Quartz Tube  BWCVD  
0020-31017 BUSHING  Terminal  BWCVD  
0020-31035 MANIFOLD  bbbbb BWCVD  
0020-31147 INSERT  BASE  ALUM  150/200MM  FLAT  
0020-31155 MANIFOLD  Gas WSi  
0020-31159 PLATE  BLANKOFF  FEEDTHRU  PRSP3  
0020-31205 PLATE BLOCKER 4 5&6" BWCVD 185 THK  
0020-31281 HINGE  CVD 8" CHAMBER  
0020-31283 HINGE  WCVD  
0020-31376 FLANGE  BASE  UNIBODY ETCH CHAMBER  
0020-31388 CLINDER FLOW THRU 4-6"  
0020-31407 BRACKET  AC CONNECTOR  UNIVERSAL COVER  
0020-31423 CLAMP  SWITCH  ETCH UNIBO  
0020-31425 MIXER GAS BOX LID BWCVD  
0020-31445 BAR UPPER LEFT DOOR HINGE  
0020-31466 PUMPING PLATE  DELTA NIT 150MM  
0020-31488 GAS DISTRIBUTION PLATE 13 HOLES  
0020-31490 GAS DISTRIBUTION PLATE  37 HOLES  
0020-31492 GAS DISTRIBUTION PLATE  101 HOLES  
0020-31509 PEDESTAL  RIMLESS  OX/MLR/NIT  200MM  NO  
0020-31530 HSG THROTTLE VALVE UNIVERSAL CHAMBER  
0020-31532 HINGE UNIVERSAL CHAMBER  
0020-31553 COVER bbbbb RF GEN CB BOX  
0020-31558 PLATE  RF BOX  ESC  
0020-31564 ROD CATHODE ESC  
0020-31572 PLATE BLOCKER 8" WSI  
0020-31600 SHIELD  PROTECTIVE  UNIBODY COVER  
0020-31609 COVER RF SHIELD INTERLOCK DELTA SACVD ALUM  
0020-31613 CYLINDER LIFT ALUM 150MM  
0020-31619 STRAP CONNECTING 150MM CERAMIC  
0020-31626 FLANGE INSULATING ESC  
0020-31627 FLANGE BASE  ESC  
0020-31656 RING CLAMPING POLY 150MM EXT CATHODE  
0020-31659 COVER  VESPEL  
0020-31660 BRKT SYMMETRICAL COIL TOP  
0020-31661 BRKT SYMMETRICAL COIL SIDE  
0020-31662 BRKT CLAMP UNIVERSAL SYMMETRICAL COIL  
0020-31676 PLATE SENSOR WAFER bbbbbbbb SENSOR  
0020-31689 CLAMP CLEAN SERVICEABLE GATE VALVE  
0020-31691 CENTERING RING GATE VALVE  
0020-31692 FTG  ELBOW  GAS SUPPLY  UNIBODY  
0020-31698 RING ADAPTER  
0020-31709 PEDESTAL OX/MLR/NIT 150MM FLAT  
0020-31747 PLATE HANDLE BASE LOADLOCK COVER  
0020-31751  
0020-31774 CYLINDER  HOT INNER  
0020-31823 BRACKET RECESSED ENDPOINT  
0020-31830 PLATE ADAPTER  ETCH CHAMBER TOP COVER  
0020-31831 PLATE ETCH CHAMBER TOP COVER  
0020-31886 FLANGE INSULATION UNIBODY ETCH  
0020-32036 PLATE BLOCKER  100SX UNIVERSAL CHAMBER  
0020-32047 POST  LOWER  2 PC  EXT PEDESTAL  LIFT  E  
0020-32048 POST  UPPER  2PC  VESPEL  EXT PEDESTAL  
0020-32121 RING ADAPTER THROTTLE VALVE  
0020-32151 PEDESTAL 200MM NOTCH HV IB SOLID COMP  R  
0020-32161 PEDESTAL ESC  200MM  NOTCH  WEB  
0020-32163 COVER BOTTOM  PEDESTAL ESC  200MM  WEB  
0020-32164 LIFT PIN CONDUCTIVE  LONG  
0020-32175 COVER BOTTOM  PEDESTAL ESC  150MM  WEB  
0020-32312 DOOR  SLIT VALVE  "S"  
0020-32364 BRACKET  RECESSED ENDPOINT  
0020-32365 FILTER UV  RECESSED ENDPOINT  
0020-32835 SPACER  LOADLOCK COVER LIFTER WPS  
0020-32909 PEDESTAL 200MM NOTCH(2) 0 8" THK ESC  
0020-32931 SUPPORT  LIADLOCK COVER LIFTER  WPS  
0020-33096 COVER GAS FEED R2 CHAMBER  
0020-33320 CARRIER  200MM (EXT  CATHODE)  
0020-33327 CHAMBER BODY  DXZ  
0020-33328 CLAMP  FLANGE  
0020-33329 BLOCK  CLAMP  
0020-33330 ISOLATOR  CLAMP  
0020-33333 FILTER  UV  CHAMBER  
0020-33334 COLLAR  DRIVE  HEATER LIFT  
0020-33339 HINGE  INNER  
0020-33341 CAP  RF (obs)  
0020-33342 HINGE  OUTER  RIGHT  
0020-33343 CUP  CLAMP SCREW  
0020-33347 LID  PUMPING PLATE  
0020-33354 PLUG  CONNECTOR  RF  
0020-33355 SHAFT  HINGE  
0020-33363 PLUG GAS FEED R2 CHAMBER  
0020-33372 TUBE EXT   TAPERD EXT  CATHODE FOR CL  
0020-33373 INSULATING FLANGE ROUND FOR CL  
0020-33404 LEVER  RATCHET  
0020-33405 PLATE  MOUNTING  THROT VALVE  
0020-33666 GAS DISTRIBUTION PLATE INSERT MTG  
0020-33668 COVER  TOP UNI-LID SEE THRU  
0020-33786 GDP  MXP 200MM HEWEB   156 THK  
0020-33806 CHAMBER  UPPER  DPS A3  
0020-33816 ISOLATOR  RF BULKHEAD  DPS  
0020-33820 CLAMP LOWER CHAMBER VPRT DPS  
0020-33967 GEAR  HINGE  
0020-34021 BRACKET TEMP SENSOR  
0020-34030 BASE PEDESTAL ESC SIMPLE CATHODE  
0020-34048 SUPPORT  BELLOWS  
0020-34075 GUIDE HINGE LOWER R2 CHAMBER  
0020-34076 GUIDE  HINGE  UPPER  R2 CHAMBER  
0020-34131 BASE RF  
0020-34148  
0020-34171 PLATE PERF 100-150MM NITRIDE NON ANODIZE  
0020-34293 TOP COVER  DSGD R2 CHAMBER  
0020-34297 TOP COVER  SSGD  R2 CHAMBER  
0020-34299 FLANGE  INSULATION  UNIBODY   400THK  
0020-34318 PLATE SPRING  
0020-34335 COVER LOADLOCK UNIVERSAL  
0020-34336 TOWER LOADLOCK COVER  8-SLOT STORAGE ELE  
0020-34429 COVER  FRONT  CHAMBER COOLING  DPS MEC  
0020-34430 COVER  BACK  CHAMBER COOLING  DPS MEC  
0020-34432 CLAMP  BRACKET  BULKHEAD  DPS  
0020-34445 PLATE  BLOCKER  DXZ "G  
0020-34447 PWR SUPP ENCLOSURE  
0020-34455 ADAPTOR  TOP  UNILID COVER  SQUARE SEAL  
0020-34527 SENSOR PLATE  LOADLOCK COVER  P5000  
0020-34587 LID PLATE  DXZ VIEW LID  
0020-34616 STOP ACME NUT DXZ  
0020-34618 COVER DRV BELT HEATER LIFT DXZ  
0020-34694 LINER  GDP R2 OXIDE  
0020-34696 FILLER  SLIT VALVE  
0020-34719 SCREW  LINER  TEFLON  SIN  DXZ  
0020-34726 CAP  BEARING  DXZ  
0020-34727 CLAMP  ACME LEAD SCREW  
0020-34730 LID  PUMPING PLATE  TEOS  DXZ  
0020-34775 BLOCKER  PERF SILOX 8" UNIV CH NON-STEPP  
0020-34828 ENCODER HOME SENSOR P-CHUCK  
0020-34829 BASE  ADAPTER HANDLE P5000 LOADLOCK COVER  
0020-34861 RETAINER LENS & FILTER H O T  DETECTOR MODULE  
0020-34881 HOUSING  OUTPUT ADAPTER  RFG2000  
0020-35002 LIFTER  SINGLE STAGE COOLDOWN CHAMBER  
0020-35003 HOUSTING  COOLDOWN LIFTER  
0020-35014 MOUNTING BLOCK  SLIT VALVE  PLATED  
0020-35032 WING FROG LEG 5200  
0020-35033 ARM FROG LEG 5200  
0020-35057 INSERT  LLA & LLB SLIT VALVE  ALUMINUM ENP  
0020-35059 INSERT  PROCESS CHAMBER SLIT VALVE  SST  
0020-35077 BLANK  SLIT VALVE  
0020-35096 ARM  CAM  WAFER LIFT  UPPER  
0020-35173 BRKT  DOOR INTERLOCK SWITCH  
0020-35187 PLATE  CYLINDER MOUNT  
0020-35188 ARM  COOLDOWN LIFTER  
0020-35192 CLAMP  CENTER FINDER bbbbbb  
0020-35213 COVER  CENTER FINDER BD  
0020-35245 DIFFUSER  XFER CHMBR  
0020-35267 RING  BULB SUPPORT  
0020-35268 GUIDE  BULB SUPPORT RING  
0020-35272 PROTECTIVE BRKT  CB 208V  
0020-35423 RETAINER  GASKET  AIR IN/ROT  
0020-35428 GASKET COVER  AIR INLET/ROTATION  
0020-35452 COOLDOWN/CENTERFINDER CHAMBER ENP  
0020-35454 COVER  COOLDOWN/CENTERFINDER CHAMBER  
0020-35456 BRKT  PRESSURE SWITCH  
0020-35474 BARRIER  PIPE Top  
0020-35475 PAD  Kapton  Quartz Robot  
0020-35544 DISC  ADJUSTMENT RETAINER  
0020-35545 BAR  ROTATION ADJ  
0020-35547 NUT  ROTATION ASSY ADJUST  
0020-35548 HOUSING  ADJUSTING NUT  
0020-35549 MOUNT  ROTATION ADJ  ARM  
0020-35590 BRACKET  MAG SWITCH  HORIZ MT  
0020-35606 BRACKET  CONN 4 POS MM  
0020-35624 RING  CLAMP  
0020-35625 SHIELD  DOME NECK  
0020-35626 GASKET  DOME NECK  
0020-35678 COVER  SHIELD  LAMP BASE  
0020-35680 CONE  UPPER LAMP MODULE  
0020-35682 REFLECTOR  2X4 FRONTSIDE  17DEG  
0020-35712 O-RING  14 764 I D  X  275 VITON 75 DURO  
0020-35741 SHIELD  PYROMETER UPPER  
0020-35758 OBS: ENCLOSURE 5 PHASE DRIVER  
0020-35761 DOOR 5 PHASE DRIVER  
0020-35784 PANEL  BULKHEAD  
0020-35789 BRACKET  HINGE  UPPER SHROUD  
0020-35791 COVER  BLANKOFF  PYROMETER  2"  
0020-35808 BRKT  WATER HOSE SUPPORT  LEFT  
0020-35809 BRKT  RIGHT  WATER HOSE SUPPORT  
0020-35818 PLATE  COOLDOWN PEDESTAL  
0020-35819 HOUSING  COOLDOWN PEDESTAL  
0020-35839 BRKT  HANGING LOWER LAMP ASSY  
0020-35857 O-RING  400MM ID X 7MM NON-STICK VITON  
0020-35894 BRACKET  WATER FLO SWITCH  
0020-35925 PANEL  SIDE COVER FRONT  
0020-35926 PANEL  SIDE COVER PROCESS CHAMBER  
0020-35948 BRKT  PLATTER 5200HT  
0020-35950 BRKT  3 WAY VALVE PLATTER  5200HT  
0020-35951 PLATE  SIDE RACEWAY  
0020-35952 PLATE  PCB MOUNT  RACEWAY RIGHT  
0020-35953 PLATE  PCB MOUNT RACEWAY LEFT  
0020-35954 PLATE  SIDE RACEWAY RIGHT  
0020-35955 PLATE  SIDE RACEWAY LEFT  
0020-35956 COVER  RACEWAY  
0020-35958 BRACKET 2  PLATTER  5200HT  
0020-35969 COVER  PLENUM HEAT EXCHANGER  
0020-35970 COVER PLENUM PORT  
0020-35972 ARM  ROTATION ADJ TIE DOWN CHAMBER A & B  
0020-35973 ARM  ROTATION ADJ TIE DOWN CHAMBER C & D  
0020-35974 BRKT  FLOW SW MOUNTING  
0020-35975 ANGLE  LOWER RIGHT DOOR  
0020-35976 BRKT  ANGLE  LOWER RIGHT DOOR  
0020-35979 COVER TOP XFMR PEC  
0020-35984 BRACKET FLOOR  
0020-35985 CHANNEL RACEWAY  
0020-36001 PLATE FLOOR FRONT RIGHT PEC FRAME  
0020-36006 PLATE FLOOR REAR EXTENSION FRAME  
0020-36014 SPG CLIP HEAT SINK  
0020-36015 AIR DAM LOWER LAMP ASSY (2 piece)  
0020-36018 BRACKET SUPPORT TO UPPER CYLINDER  
0020-36021 CLAMP BELLOWS MAG COUPLED ROT  
0020-36022 SHAFT TRAVEL ADJUSTMENT MAG COUPLED ROT  
0020-36023 BRACKET CYLINDER MOUNTING  
0020-36024 BRACKET MOUNTING LOWER CYLINDER  
0020-36025 BRACKET OPTO SENSOR  
0020-36026 BRACKET LOCATING ROTATION ARM  
0020-36027 PIN LOCATING ROATATION ARM  
0020-36028 FLAG OPTO SENSOR  
0020-36029 SHAFT MAG COUPLED ROTATION  
0020-36030 HOUSING UPPER LAFER LIFT  
0020-36031 HOUSING MAGNETICALLY COUPLED ROTATION  
0020-36032 HOUSING ISOLATION MAG COUPLED ROTATION  
0020-36033 COUPLING MAGNETIC ROTATION  
0020-36035 MAGNET  ROTATION ASSEMBLY  
0020-36036 HOUSING MAGNETIC  
0020-36037 COVER END MAG COUPLED ROTATION  
0020-36040 SPACER GEAR DRIVE MAG COUPLER ROT  
0020-36041 SPACER  
0020-36043 SPACER  
0020-36044 NUT  MACHINED  
0020-36049 PANEL CONVENIENCE OUTLET  
0020-36061 PLATE COVER GAS PANEL RACEWAY  
0020-36062 BLOCK LOCKING GAS PANEL  
0020-36064 BRKT EXTENSION HANDLE MECH  
0020-36065 BRKT SUPPORT MAIN CB COVER  
0020-36066 BRKT SUPPORT RELAY COVER  
0020-36067 BRACKET DRIVER MOUNTING  
0020-36068 OBS BRKT UPPER SCR CB MTG  
0020-36069 BRKT LOWER SCR CB MTG  
0020-36072 STANDOFF MAIN CB BRKT REM AC ENCLOSURE  
0020-36073 STANDOFF PANEL BD REM AC ENCLOSURE  
0020-36078 PROTECTIVE COVER UPPER CB BRKT  
0020-36079 PROTECTIVE COVER LOWER CB BRKT  
0020-36080 FACEPLATE UPPER SCR CB  
0020-36100 PROTECTIVE COVER  Side Driver COMP  
0020-36127 BUSS BAR GND SYSTEM AC DIST BOX MAINFRAME  
0020-36128 GND BAR MAIN REM AC ENCLOSURE  
0020-36134 PLATE SIDE RACEWAY LEFT  
0020-36144 COVER PROTECTIVE SCR FUSE BLK  
0020-36145 BRKT EXTENDER INTR SW AC BOX  
0020-36146 ANGLE LOWER LEFT DOOR  
0020-36153 BRKT MAIN CB MTG REM AC ENCLOSURE  
0020-36158 PLATE FLOOR FRONT INNER PEC FRAME  
0020-36181 SHELL CONNECTOR PROCESS CHAMBER  
0020-36182 CLAMP CONNECTOR STRAIN RELIEF  
0020-36183 BRACKET CONNECTOR PROCESS CHAMBER  
0020-36211 PLATE FLOOR FRONT L/R MAIN FRAME  
0020-36219 BRKT 3 WAY VALVE VERTICAL 5200HT  
0020-36233 BRACKET 2 PHASE DRIVER MOUNTING  
0020-36235 FLANGE BLOWER INLET PORT  
0020-36242  
0020-36275 BLADE AIR VANE 6" A/C DUCTING  
0020-36276 SHAFT AIR VANE 6" A/C DUCTING  
0020-36285 LINER AIR SHROUD REAR  
0020-36287 SPLIT PLATE SHROUD WATERLINE  
0020-36290 BRKT FUSE SUPPORT REM AC BOX  
0020-36295 PANEL BULKHEAD D-CONNS CHBR A & C CENTURA  
0020-36301 INSULATOR BUSBAR 2 bbbbbbbb  
0020-36302 INSULATOR BUSBAR 3 bbbbbbbb  
0020-36303 INSULATOR BUSBAR 4 bbbbbbbb  
0020-36308 BRACKET  DOOR INTERLOCK SWITCH  
0020-36333 PANEL BLKHD PROCESS CHAMBER CONNECTOR  
0020-36342 BUSS BAR MAIN DIST 750A  
0020-36343 BUSS BAR JUMPER MAIN DIST  
0020-36344 CONNECTING STRAP 125A REMOTE AC BOX  
0020-36346 INSULATOR ANGLE  PHASE A  RIGHT  
0020-36347 INSULATOR ANGLE  PHASE A  LEFT  
0020-36350 INSULATOR ANGLE  PHASE C  RIGHT  
0020-36351 INSULATOR ANGLE  PHASE C  LEFT  
0020-36352 INSULATING BRKT BOTTOM MAIN RELAY  
0020-36353 BRKT NUT RETAINER COVERS MTG  
0020-36355 OBS: PROTECTIVE COVER MAIN CB OUTPUT  
0020-36356 OBS: PROTECTIVE COVER SCR CONTACTORS  
0020-36357 BUSS BAR VERT 0A CONT OUTPUT  
0020-36358 BUSS BAR HORZ 0A CONT OUTPUT  
0020-36359 BUSS BAR 0B CONT OUTPUT  
0020-36360 BUSS BAR 0C CONT OUTPUT  
0020-36361 BUSS BAR MAIN CB OUTPUT  
0020-36362 COVER BEARING R3 ROTATION  
0020-36364 COVER TERMINAL BLOCK 12 bbbbbbbb  
0020-36385 REMOTE AC BOX CONNECTING STRAP  
0020-36393 GEAR SPUR DRIVEN R3 ROTATION  
0020-36408 PLATE INSULATING MAIN CB  
0020-36409 PLATE INSULTING 250A J-FRAME  
0020-36410 PLATE INSULATING XbbbbER CB  
0020-36418 NUT  CLAMP TRANSFER CHAMBER  
0020-36419 CLAMP TRANSFER CHMBR  
0020-36420 STUD CLAMP TRANSFER CHMBR  
0020-36421 BRKT  FLANGED CONN MOUNT  
0020-36422 BRKT  CABLES MANIFOLD PNEUMATIC  
0020-36430 BRKT MTG CURRENT XbbbbER  
0020-36470 SPACER BEARING ASD 5200 ROTATION  
0020-36472 PANEL BLANK 19" X 8 72  
0020-36480 BRKT  XbbbbER 1 5KVA REM AC BOX  
0020-36485 COVER EXH DUCT-PANEL  
0020-36490  
0020-36507 BKT PCB ROTATION 3 1  
0020-36546 STOP RAIL BEARING R3 1 ROTATION  
0020-36547 BRKT PNEUMATIC CONNECTOR R3 1 ROTATION  
0020-36574 SHLD TERMINAL BLOCK 8 POS  
0020-36603 COVER TOP LEFT REM AC BOX  
0020-36641 BRACKET STRAIN RELIEF UMBILICAL CABLE  
0020-36642 CLAMP STRAIN RELIEF UMBILICAL CABLE  
0020-36656 PLATE INSULATING MAIN CR  
0020-36690 OBS: PROTECTIVE COVER  MAIN CB OUTPUT  
0020-36694 PROTECTIVE COVER  BUSS BARS  
0020-36713 SPACER  BEARING ROT 3 2  
0020-36787 PLATTER  MAIN  EPI  
0020-36788 PLATTER  CHAMBER  EPI  
0020-36817 HSG  ROT  R3  MAG  COP  
0020-36819 OBS: PANEL FLOW SWITCH  
0020-36855 PANEL BLKHD PROCESS CHMBR CONN  
0020-36932 ENCL RELAY & SENSOR  EMO/GFCI  
0020-36933 PROTECTIVE COVER  EMO/GFCI Enclosure  
0020-36936 BRKT PANEL BD MTG 30 POS  
0020-36938 BUSS BAR  CENTER GFCI CXbbbbER  
0020-36953 PLATE FLOOR CHMBR C FRAME  
0020-36954 PLATE FLOOR CHMBR B PEC FRAME  
0020-36955 INSULATOR ANGLE  PHASE B  LEFT  
0020-36956 INSULATOR ANGLE  PHASE B  RIGHT  
0020-36957 BRKT FLOOR CHMBR C D PEC FRAME  
0020-36962 BUSS BAR  FLEXIBLE  PNL BD  30 POS  
0020-36963 BRKT  WATER MANIFOLD  
0020-36964 BRKT  CONT CABLE SUB D CONN  
0020-37016 CLAMP RUBBER SEAL  LAMP HOUSING  UPPER  
0020-37027 SPACER  WAFER LIFT  
0020-37028 PLATE FOOR FRONT LEFT PEC FRAME  
0020-37051 RETAINER  BEARING R3 ROT  
0020-37054 COVER  FUSE BLOCK  2 POS  
0020-37059 BRKT  FRONT MOUNT  AC BOX  
0020-37066 BRACKET H2 SENSOR  
0020-37075 OBS: COVER PROT  30 POS  PANEL BD  
0020-37102 OBS: PANEL FLOW SWITCH LEFT  
0020-37103 BOX DETECTOR HOUSING  
0020-37104 COVER H2 SENSOR EXHAUST  
0020-37122 PLATE STIFFENING BOTTOM AIR SHROUD  
0020-37146 SEAL RUBBER LAMP HOUSING UPPER  
0020-37150 BUSS BAR  RIGHT GFCI2  480V SYSTEM  
0020-37151 BUSS BAR  CENTER  GFCI2  480V SYSTEM  
0020-37152 BUSS BAR  NEUTRAL  GFCI2  480V SYSTEM  
0020-37154 BUSS BAR  FLEXIBLE  PANEL BD 54 POS  
0020-37155 BRKT MTG GFCI2  480V SYSTEM  
0020-37156 INSUL CHANNEL GFCI2 BUSS BARS  
0020-37179 PLATE IHC ASSY POS A & C  
0020-37196 CHASS EMO/GFCI XbbbbERS REMOTE AC BOX  
0020-37197 PROTECTIVE COVER  EMO/GFCI Transbbbbers  
0020-37198 PANEL BLANK  208Y/480V SYS  
0020-37203 FLAG PROCESS bbbbbbbb DETECT R3 ROTATION  
0020-37214 COVER SHIELD LAMP BASE LOWER  
0020-37215 CONE LH LOWER LAMP MODULE  
0020-37216 CONE RH LOWER LAMP MODULE  
0020-37221 BAR GROUND bbbbbbbbS  CHAMBER TRAY  
0020-37228 REFLECTOR LH 2X4 FRONTSIDE PARABOLIC  
0020-37229 REFLECTOR RH 2X4 FRONTSIDE PARABOLIC  
0020-37264 BUSS BAR  FLEXIBLE NEUTRAL GFCI2  
0020-37276 PANEL POS B/D BULKHEAD D-CONNS  CHAMBER TRAY  
0020-37303 PANEL POS A/C BULKHEAD D-CONNS  CHAMBER TRAY  
0020-37321 RING PARTICLE SHIELD R3 ROTATION  
0020-37555 COVER LAMP AC BOX RTP  
0020-37696 PLATE BLANK BOX CONNECTORS  
0020-37711 PLATE FLOOR FRONT CENTER LEFT PEC FRAME  
0020-37714 TOOL LEAK CHECK RTP CHAMBER  
0020-37816 ENCLOSURE PYRO AC RTP  
0020-38098 5200 MF PART  
0020-38126 PART  
0020-38226 BULKHEAD AC/CENTURA RTP  
0020-38461 BRKT  BLOWER MOUNT  
0020-38462 PLATE  ISOLATOR MOUNT  
0020-38463 BAR  SUPPORT BLOWER  
0020-38553 BRACKET PCB *LESS MOTOR R3 4 ROTATION  
0020-38554 COVER PCB *LESS MOTOR R3 4 ROTATION  
0020-38663 SPACER SLIT VALVE MXP CENTURA  
0020-38786 CARRIER 5200 MXP ESC OXIDE  
0020-38790 HOUSING  BOTTOM CONNECTOR  
0020-38970 RACEWAY UPPER TOXIC GAS LINES RTP  
0020-39015 AC ENCLOSURE B & D bbbbbbbb 5200/CENTURA  
0020-39087 PEDESTAL  195MM SEMI NOTCH NO FLAT  DPS  
0020-39252 SHIM CLAMP SPRING DXZ LID  
0020-39253 SHIM  LEFT CLAMP DXZ CHAMBER  
0020-39304 PLATE AIR VANE LOCK CENTURA  
0020-39401 MNFLD SST H20 SUP/RTN  
0020-39487 HINGE RIGHT LID PUMPING PLATE DXZ  
0020-39488 HINGE LEFT LID PUMPING PLATE DXZ  
0020-39489 CLAMP CLUTCH LID PUMPING PLATE DXZ  
0020-39504 COVER  SPDT SWITCH  DXZ  
0020-39657 SHROUD  COVER  
0020-39698 PLATE ADAPTER WXP CH  CENTURA  
0020-39701 CLAMP  bbbbbb  
0020-39732 CLAMP  MIDDLE  EXHAUT TOP KIT  
0020-39839 BRKT INSUL RELAY CVR SUPPORT  
0020-40002 KEY ACTUATOR  
0020-40017 OBS: BRACKET DOOR SW MT  
0020-40018 COVER DOOR SW MT  
0020-40022 BAR SAFETY DOOR MECH  
0020-40030 BRACKET  TOP  MOTOR  
0020-40051  
0020-40063 BRACKET  BOTTOM  MOTOR  
0020-40066 BLANK CRYO PUMP ROUGHING  
0020-40085 MOUNT BRAKE INDEXER  
0020-40117 PLATE  BLOCKOFF 1 40 DIA TRANSFER CHAMBER  
0020-40158 BRACKET  MOUNTING  
0020-40159 BRACKET  LOAD LOCK  WBLL  
0020-40160 BRACKET  BOTTOM  WBLL TO BEZEL  
0020-40211 PUMPING PLATE  200MM  SINGEN/OXZGEN  
0020-40240 INSERT CHAMBER/FINGER THRU  
0020-40301 SHAFT  CAM FOLLOWER DOOR MECH  
0020-40359 RETAINER SPRING DOOR MECH  
0020-40360 bbbbAGE CARRIAGE DOOR MECH  
0020-40362 PLATE  PNEUMATIC MANIFOLD  
0020-40412 BLANK  NON-ENP CENTERFINDER  
0020-40413 BLANK  ENP CENTERFINDER  
0020-40415 MANIFOLD BRACKET  CHAMBER  
0020-40564 BLANK-OFF bbbbbbbb E&F NON-ENP  
0020-40567 TRANSFER CHAMBER DE ROBOT  ENP  
0020-40580 CONVERSION PLATE  ROBOT TC ENP  
0020-40595  
0020-40596  
0020-40700 COUPLING  DRIVEN  
0020-40704 FRONT COVER  
0020-40706 REAR COVER  
0020-40716 CARRIAGE  LHS  
0020-40717 CARRIAGE  RHS  
0020-40719 MOUNT  CONNECTOR  
0020-40722 BASE PLATbbbb LLC  
0020-40723 ADAPTER  LHS/RHS PLATbbbb  
0020-40729 STOP BEARING MOUNT LLC DOOR  
0020-40779 BLOCK  CYL MT  LLC  
0020-40863  
0020-40864  
0020-40871  
0020-40885 PANEL  UMBILICAL BULKHEAD  
0020-40888 SUPPORT  CARRIAGE  LLC  
0020-40905 BLANK  FACE A-B-C-D  NON-ENP  
0020-41030 TOP PLATE PLATbbbb bbbbL CASSETTE  
0020-41091 MOUNT SAFETY VALVE  
0020-41193 PLATE  SIDE  LHS DOOR ME  
0020-41194 PLATE  SIDE  RHS DOOR ME  
0020-41206 BASE  TOP PLATE  PLATbbbb  
0020-41207 BLOCK  CENTER  TOP PLATE  
0020-42004 CARRIER LOWER WXZ  
0020-42005 CARRIER UPPER WXZ  
0020-42006 TUBE LIFT WXZ  
0020-42009 HOUSING OUTER CONN FEMALE  
0020-42011 PLATE SPRING WXZ  
0020-42012 BRACKET SPRING  
0020-42013 PLATE MOTOR DRIVE WXZ  
0020-42023 BLOCK LWR GAS BELLOWS  
0020-42028 OBS PUSHBUTTON  HINGE  WXZ  
0020-42029 PUSH LEVER  HINGE  WxZ  
0020-42030 CAP  END LT  HINGE WxZ  
0020-42033 SHAFT GEARLOCK HINGE WXZ  
0020-42046 SCREW  THUMB  INLET  WXZ  
0020-42050 ADAPTER END PT DETECTOR BD  WXZ  
0020-42052 HINGE UPPER  WXZ  
0020-42073 GUIDE  PIN SPIRNG  
0020-42074 PLATE  COVER  END CAP  WxZ  
0020-42075 FLANGE  HEATER DRIVE  
0020-42081  
0020-42083 PLATE  PUMPING  6" FC  WXZ  
0020-42086 CLAMP  LT  HOLD DOWN  WXZ  
0020-42087 CLAMP  RT  HOLD DOWN  WXZ  
0020-42112 CYLINDER  LIFT  AL  200MM  CERAMIC  
0020-42158 BRACKET  MFC  STABILIZER  
0020-42166 FLAG  SENSOR LIFT  
0020-42169 BRACKET  HTR RETRACT INTLK  
0020-42170 HAMMER  HTR RETRACT INTLK  
0020-42200 BLOCK  CLAMP  BELLOWS W/FLAT  
0020-42216 BLOCK TOP GAS BELLOWS WXZ  
0020-42220 BLOCK MOUNTING GAS MOD WXZ  
0020-42234 BRACKET 5 PH MOTOR DRVR WXZ  
0020-42236 BRACKET HEATER DRIVE WXZ  
0020-42237 CLAMP PULLEY WXZ  
0020-42239 OBS  PLATE MOTOR DRIVE WXZ  
0020-42252 BRACKET VALVE WXZ  
0020-42258 MANIFOLD WATER BWCVD  
0020-42260 PLATE  CLAMP ISO EC WXZ  
0020-42286 PLATE PERF 6" EC WXZ  
0020-42289 BLOCK PLUNGER INTERLOCK WXZ  
0020-43269 STRAP1  SIDE COIL  GND  CHAMBER  ULTIMA  
0020-46316 SPACER  LIFT PIN HOOP  10 INCH DIAMETER  
0020-70076 SUPPORT  GUIDE SHAFT  29 POSN STOR ELEV  
0020-70080 PLATE  CASS INDEXER  29 POSN STOR ELEV  
0020-70089 LID LLC  29 POSN STOR ELEV  
0020-70139 COVER ENCODER INTERFACE BOARD  
0020-70140 bbbbbb  
0020-70147 CHAMBER  UPPER  29 POSN STOR ELEV  
0020-70179 BRACKET  LLC LID  29 POSN STOR ELEV  
0020-70180 SUPPORT DOOR DLL  
0020-70184 RING CNTR LLC LID  
0020-70186 BRKT RIGHT LAMINAR FLOW SKINS  
0020-70192 SCREEN TOP LAM FLOW SKINS  
0020-70203 PLATE CHAMBER BLANKOFF  
0020-70210 BRACKET GUIDE FRONT PANEL DOOR  
0020-70223 PLATE CHAMBER MONOLITH  
0020-70255 BRACKET CENTERFINDER BOARD  
0020-70271 PIVOT  ONE PIECE LEFT  
0020-70272 PIVOT  ONE PIECE RIGHT  
0020-70285 BLADE 8 INCH  BUFFER  FROG LEG  
0020-70288 bbbbbb UPPER  
0020-70336 WING FROG LEG  
0020-70343 BRACKET  MOTOR  ROTATION  ORIENTER  WAFER  
0020-70347 bbbbbb  LOWER bbbbb  
0020-70348 bbbbbb  UPPER bbbbb  
0020-70375 COVER CHAMBER  
0020-70376 CHAMBER ORIENTER/DEGAS  
0020-70390 BRACKET LIFTER 15 SLOT ELEVATOR  
0020-70391 COVER bbbbbb LASER / BARCODE OPTICS  
0020-70430 SPR LEAF SLIT VALVE  
0020-70432 HINGE  LEFT SLIT VALVE  
0020-70433 HINGE  RIGHT SLIT VALVE  
0020-70434 DOOR  SLIT VALVE  
0020-70436 PLATE  CAM SLIT VALVE  
0020-70462 PANEL BREAKER MOUNTING  
0020-70489 MANIFOLD CATHODE J SST  
0020-70583 DOOR  LOADLOCK ALUMINUM  
0020-70605 OBS-DOOR CARRIAGE L H  LEFT HAND  
0020-70606 OBS-DOOR CARRIAGE R  H  RIGHT HAND  
0020-70643 OBS  DOOR  SLIT VALVE  ADOIZED  CENTURA  
0020-70647 OBS PLATE  MFC-STEC LINE  N2 PURGE  
0020-70711 BKT  SPEED CONTROL  TILT CASSETTE  
0020-70823 OBSOLETED  USE 0040-24190 CHE F COVER  
0020-75037 STOP LL DOOR  
0020-75041 DOOR DLL  
0020-75073 CRANK  
0020-75088 SUPPORT CARRIAGE DLL  
0020-75089 CARRIAGE LH DLL  
0020-75090 CARRIAGE RH DLL  
0020-75092 CLAMP VIEWPORT WC CHAMBER  
0020-75097 BAR SAFETY  
0020-75108 CLEAT  
0020-75166 PLATE SIDE LH LOAD LOCK DOOR  
0020-75167 PLATE SIDE RIGHT LOAD LOCK DOOR  
0020-75168 TRACK LOAD LOCK DOOR  
0020-75181 CLAMP  CASSETTE PLATbbbb  
0020-75187 DOOR DLL ENP  
0020-75199 FRAME  CHAMBER TRAY  
0020-75200 OBS: TRAY  PNEUMATICS/IO MOUNTING  
0020-75201 OBS:BRACKET CHAMBER TRAY PNEUMATICS MANIFOLD CENTU  
0020-75202 BLANKOFF  CH TRAY INTERCONNECT PCA COVER  
0020-75254 CLAMP  1" FNPT SST CROSS  
0020-75265 COVER  LEFT RUNWAY  COMMON CENTURA GASLINE  
0020-75267 COVER  MAIN CB  
0020-75268 COVER  FRONT DRIVER  
0020-75352 FTG RDCR TEE 1-1/4 MNPT X 1 X 1 FNPT  SST  
0020-75363 VACUUM PORT COVER  SST  
0020-75364 CAP BAFFLE SCREEN  SST  
0020-75381 PANEL  FRONT  HARD DISK DRIVE  
0020-75736 CAM LEFT INBOARD CORROSION RESISTANT  
0020-75737 CAM  RIGHT OUTBOARD CORROSION RESISTANT  
0020-75738 CAM  RIGHT INBOARD CORROSION RESISTANT  
0020-75739 CAM  LEFT OUTBOARD CORROSION RESISTANT  
0020-75759 BRACKET  CDA TTF FITTING MOUNTING  
0020-75852 PLATE TOP PLATbbbb WBLL CMF CENTURA  
0020-75998 BRACKET  SUPPORT  WBLL FASTER WAFER MAPPING  
0020-76043 BEARING CLAMP STORAGE ELEVATOR  
0020-76063 SHAFT FITTING ROBOT DRIVE  
0020-76065 IDLE GEAR ROBOT DRIVE  
0020-76077 BUSHING SHAFT RETAINER ROBOT DRIVE  
0020-76081 CAP JOINT 1 06 ROBOT DR  
0020-76082 CAP JOINT  875 ROBOT DR  
0020-76086 PIN WRIST ROBOT DRIVE  
0020-76100 BRG RETAINER ROBOT BLADE  
0020-76107 DOWEL PIN 200MM ROBOT BLADE  
0020-76108 LONG DOWEL PIN 200MM ROBOT BLADE  
0020-76111 DISTRIBUTOR 200MM ROBOT BLADE  
0020-76118 DISTRIBUTOR 100MM ROBOT BLADE  
0020-76178 LIFTER  NON-ENP  SINGLE STAGE COOLDOWN CHAMBER  
0020-76179 HOUSING  LIFTER  NON-ENP COOLDOWN CHAMBER  
0020-76180 CHAMBER COOLDOWN  CENTERFINDER NON-ENP  
0020-76183 DOOR  SLIT VALVE  bbbbL ETCH  BRG  1875I  
0020-76190 CLAMP1  1" OVERPRESSURE LINE  
0020-76191 CLAMP2  1" OVERPRESSURE LINE  
0020-76301 ADAPTER  SLIT VALVE  
0020-76307 COLUMN ENP CHAMBER LID LIFT  
0020-76363 TURBO CONTROLLER 341MC/T BLANKOFF  
0020-76376 OBS: BRACKET  UPPER-TURBO CNTRLR CENTURA A/C RACK  
0020-76377 OBS: BRACKET  LOWER TURBO-CNTRL CENTURA A/C RACK  
0020-76391 OBS: COVER AC ENCLOSURE CENTURA FACILITIES TRAY  
0020-76393 PLATE  BLANKOFFF  CENTURA CHMBR FAC  
0020-76400 HINGE  HIDDEN  
0020-76447 MTG PLATE SHUTOFF VALVE FAC  I/F CENTURA 5200ST  
0020-76597 CASSETTE PLATbbbb  Z DRIVE  
0020-76690 MOUNT DOOR TRANSFER SLIT VALVE  
0020-76692 SPACER  ROTATION BEARING  LOWER COLLET  
0020-76884 COVER ROBOT MTR  
0020-76886 BRKT MOTOR CASS INDEXER  
0020-76937 BRKT  FAN  SCR DRIVER  
0020-76981 RACEWAY  REAR  LEFT  CENTURA UHP GAS PNL  
0020-76982 RACEWAY  REAR  RIGHT  CENTURA UHP GAS PN  
0020-76983  
0020-89772 HOUSING  GRIP SUSCEPTOR SUPPORT SHAFT  EPI  
0020-99069 SHIELD HEAT QXP ISPM SST  
0020-QT001  
0020-XX002 PLATE  PUMPING  
0020-XX003 PLATE  PUMPING  
0020-XX004 PLATE  PUMPING  
0020-XX005 PLATE  PUMPING  
0020-XX006 PLATE  PUMPING  
0020-XX007 PLATE  PUMPING  
0020-XX010 PLATE  PUMPING  
0020-XX011 PLATE  PUMPING  
0020-XX012 PLATE  PUMPING  
0020-XX013 PLATE  PUMPING  
0020-XX014 PLATE  PUMPING  
0021-00101 SHIELD TC AMP WXZ  
0021-00279 FILLER HOUSING  SDLIT VALVE  INSERTS  
0021-00329 FLAG DUAL OPTO SENSOR 200MM UNIVERSAL LI  
0021-00385 MOUNTING RING  DOME  THICK  DPS POLY  
0021-00390 SCR  CAPTIVE  CENT PH 10-32 UNF TI FACEP  
0021-00571 INSERT  CHAMBER EXHAUST  EPI 200MM SST  
0021-00697 BRACKET REGULATOR O2 ANALYZER  RTP  
0021-00805 PEDESTAL  AL  200MM  NOTCH  CERAMIC  CON  
0021-01004 OBS  SCR  4-40X 54L  FACEPLATE  GIGA-FILL  
0021-01010 CLAMP  DXZ  CXZ  LID  OVER PRESSURE  
0021-01406 PLATE  PUMPING  
0021-01421 CHAMBER  UPPER  A-COAT  M-DPS  
0021-01568 SCR  4-40X 38L  BLOCKER  GIGA-FILL  
0021-01730 COVER  TOP  MULTI-SLOT COOLDOWN  
0021-02482 BRACKET  SENSOR  LIFT  DXZ  
0021-02485 DXZ PART  
0021-02486 DXZ PART  
0021-02565 HDP PART  
0021-02772 CVXZ CHAMBER VACCUM PORT  
0021-02793 CAPTIVE SCREW  HASbbbLOY  4-40 X  35LG  
0021-03319  
0021-03371 DLK CHM LID  
0021-03481 BRACKET  VAT-CONTROLLER  
0021-03690 SHIELD  MAGNETIC  HR DTCU  DPS CHAMBER  
0021-03804 MANIFOLD OUTPUT GAS TI-XZ 1:1  
0021-03882 BRACKET FORELINE SUPPORT  PRODUCER  
0021-04474 SAFETY COVER  HEATER LIFT  
0021-04509 RECEIVER 200MM CASSATTE FOR PA200-8MHEI  
0021-04952 BRACKET HEATER LIFT DXZ  
0021-06083 BRACKET  SUPPORT  OUTER  DXZ  FLUORINE  
0021-06214 VIEWPORT  INDEPENDENT LL PUMP & VENT  PR  
0021-06431 BRACKET  ASTRON SUPPORT  SINERGY CHAMBER  
0021-06661 RETAINER  SEAL  SIGMA THROTTLE VALVE  
0021-06804 COVER  FLR REARFRAME  OUTER SECTION UWAV  
0021-09004 SHIELD  PROTECTIVE  MXP  SGD  
0021-09069 SLEEVE  MOUNTING SCREW  
0021-09104 LINER  CATHODE  ALIGNED  OXIDE ETCH  
0021-09154 COVER bbbbb LID  ENHANCED UNIBODY  
0021-09185  
0021-09446 CLAMP  RF  BULKHEAD  CATHODE  DPS  
0021-09474 MOUNTING RINGS  
0021-09506 MOUNTING RING  DOME  DPS  
0021-09524 BLOCK  MOUNTING  GASLINE  NYLON  DPS  
0021-09581 BRIDGE  STRUT  DPS CHBR  POS "A"  
0021-09582 BRIDGE  STRUT  DPS CHBR  POS "B"  
0021-09583 BRIDGE  STRUT  DPS CHBR  POS "C/D"  
0021-09604 SHROUD  PINCH POINT  BACK  DPS  
0021-09620 COVER  CONDUIT HOUSING BOX  DPS  
0021-09622 CHASSIS  HV FILTER BOX  DPS  
0021-09627 MOUNTING RING  DOME  DPS POLY  
0021-09628 CLAMP RING  DOME  DPS POLY  
0021-09629 KEY  CLAMP RING  DOME  DPS POLY  
0021-09703 PLATE  BLOCKER 200MM NON R-F  
0021-09708 INSULATOR  GDP  TRENCH-NARROW GAP  
0021-09718 LINER SLIT VALVE  
0021-09720 PLATE MOTOR HEATER LIFT DXZ  
0021-09726 BRACKET SPRING HEATER LIFT DXZ  
0021-09730 COVER  MOLDED  PUMPING PLATE  DXZ  
0021-09731 (OBS) LID  PUMPING PLATE  TEOS  DXZ  
0021-09735 CHAMBER BODY  DXZ  
0021-09758 MANIFOLD  OUTPUT  DXZ  
0021-09909 FACEPLATE  SIN  DXZ  
0021-09914 PLATE  BLOCKER  DXZ SACVD  CENTURA  
0021-09922 DOOR  SLIT VALVE  ADOIZED  CENTURA  
0021-09947 HOUSING TC AMP DXZ  
0021-09948 COVER  TC AMP DXZ  
0021-09984 BRACKET  LID SWITCH RETROFIT  DXZ  
0021-09988 COVER  LID SWITCH RETROFIT  DXZ  
0021-10067 MIRROR CHAMBERS P5000 MC ROBOT  
0021-10152 PLATE  COOLDOWN PEDESTAL  
0021-10219 INSULATOR HINGE CLAMP LID  
0021-10221 COVER GAS FEED R2 CHAMBER  
0021-10226 PUMPING PLATE AxZ  
0021-10328 DOOR  SLIT VALVE  CENTURA  SST  
0021-10438 INSULATOR PWR SIDE TEFLON DPA  
0021-10474 BRACKET ENDPOINT/PYROMETER SUPPORT  IPS  
0021-10518 bbbbbb LOWER ANTI-STATIC  
0021-10519 bbbbbb UPPER ANTI-STATIC  
0021-10634 PLUG THROTTLE VALVE UNIVERSAL CHAMBER  
0021-10665 BLOCK TEFLON CHAMBER LID GIGA-FILL SACVD  
0021-10959 ADAPTER APPLICATOR RPS BOTTOM MOUNT GIGA  
0021-11186 LINER  EXHAUST  NI PLATED  200MM TICL4  
0021-11747 COVER  PEDESTAL  8" A101 VECTRA-IMP  W/  
0021-11833 COVER  TC AMP WXZ  
0021-13193 TOP PLATE  
0021-16769 CLIP  PUMP PORT  TICL4 200MM  
0021-20197 SHIM 0 25MM G-TYPE ENCAPSULATED MAGNET C  
0021-20199 SHIM 1 0MM G-TYPE ENCAPSULATED MAGNET CL  
0021-20789 RING  DEbbbbbbbb  8" SNNF  ESC  W/B CHAM  
0021-20797 MANIFOLD  
0021-21307 BUSHING COIL SUPPORT  ELECTRA IMP-CU  
0021-21469 RING RESTRAINT  1 574 DIA SHFT  8" BESC  
0021-21470 RESTRAINT PIN  CERAMIC RINGS  HESC  
0021-21975 CASSETTE SUPPORT PLATE  
0021-21978 OBS-END PLATE 316  
0021-21980 COVER WAFER MAP LED  
0021-21981 bbbbAGE  
0021-22586 SHUTTER DISK  8" B101  
0021-23198 HOOP  LIFT  OPEN  8" MCA E-CHUCK  
0021-23550 MANIFOLD  bbbbb MOD  
0021-30165  
0021-35226 FACEPLATE PYROMETER RTP  
0021-35731  
0021-35790 DOOR  SLIT VALVE  CENTURA  ALUM ENP  
0021-35864 HINGE OVAL  INNER LID  PUMPING PLATE  
0021-35866 HARD STOP LID  HINGE DxZ PUMPING PLATE  
0021-35922 (OBS) CHAMBER BODY  TXZ MCVD  
0021-36054 BRACKET LOADLOCK FRONT PANEL  
0021-36102 PANEL  FR  NLL/PAINTED  RTP  
0021-36130 FLANGE  BASE  ETCH CHAMBERS  
0021-36144 SCREEN  VIEWPORT  LOWER CHAMBER  DPS  
0021-36198 BLOCK EXHAUST PORT DCSXZ  
0021-36561 BLANKE BASE CERAMIC HEATER GIGA-FILL SAC  
0021-36604 BRACKET COIL REAR TOP R2  
0021-36605 BRACKET COIL REAR BOTTOM R2  
0021-36606 BRACKET COIL FRONT ENHANCED UNIBODY  
0021-36626 CLAMP  VIEWPORT  LOWER CHAMBER  DPS  
0021-36696 BRKT  LAMP MODULE CONNECTOR  
0021-36697 GASKET  LAMP MODULE CONN BRKT  
0021-36716 BLOCK  MOUNTING  GASLINE  NYLON  DPS  
0021-36719 BULKHEAD  WATER  LOWER CHAMBER  MAIN  DPS  
0021-36744 SHIELD  GROUND  150MM CATHODE  DPS  
0021-36951 CLAMP  1/4" TUBING (Super Strut)  
0021-37158 KAPTON PAD  EHP-CR ROBOT BLADE  
0021-37408 BRACKET  SPRING  HEATER LIFT  CVD 300  
0021-37495 BASE  WRIST  INVERTED  MOUNTING EHP-CR R HP+  
0021-37496 TOP  WRIST  INVERTED MOUNTING HP+  
0021-37499 WING  RIGHT  HP+ EMP ROBOT  
0021-37507 ARM  LEFT  HP+ ENP ROBOT  
0021-37508 ARM  RIGHT  HP+ ENP ROBOT  
0021-37701 SIDE RECEIVER  LEFT 200MM  316-EP  
0021-37702 SIDE RECEIVER  RIGHT 200MM  316-EP  
0021-37832 HOUSING  CONNECTOR  BOTTOM MODULE  CXZ  
0021-38027 TUNNEL  UPPER  GAS PANEL  
0021-38052 SLEEVE INCONEL CASSETTE HANDLER  LONG  
0021-38119 FACEPLATE  DXZ DCVD CENTER HOLE  
0021-38127 TUBE LIFT  DXZ  
0021-38133 BALL STUD  5/16-18 X  86LG DXZ GAS SPRIN  
0021-38791 INSERT RING  ALUMINUM LONG  GIGA-FILL  
0021-38826 SLEEVE INCONEL CASSETTE HANDLER  
0021-38832 BEARING PLASTIC  CASSETTE HANDLER CENTUR  
0021-38875 GASKET  S-SECTION 7 0" X 5 5" X 5"  SILI  
0021-38876 GASKET  S-SECTION 7 0" X 3 2"X  5"  SILI  
0021-38877 RETAINER  AIR DUCT SEAL INLET 7 6 x 6 14 UHMW  
0021-38878 RETAINER  AIR DUCT SEAL OUTLET 7 6 x 3 78 UHMW  
0021-38879 BRACKET  REST  AIR DUCT  
0021-38880 BRACKET  PIVOT  AIR DUCT  
0021-39066 PLATE  ADAPTER NON-TURBO  Ti-xZ MCVD  
0021-39081  
0021-39362 CLAMP  THERMOCOUPLE PORT  BASE PLATE  
0021-39640 BRACKET NAROOW BODY LL PANEL SUPPORT  
0021-41125 GAS DISTRIBUTION PLATE  13 HOLES  
0021-41451 VIEWPORT  COVER  TRANSFER CHAMBER  
0021-47648 BEZEL  CONTROL PANEL  
0021-70146 INDEXER HOUSING  RIGHT  
0021-70147 INDEXER HOUSING  LEFT  
0021-70208 MFC  STABILIZER BRACKET (MOD )  
0021-70281 COVER FRONT CHMBR COOLING DPS POLY  
0021-70282 COVER BACK CHMBR COOLING DPS POLY  
0021-70471 CARRIAGE  NARROW BODY  RIGHT HAND  
0021-70472 CARRIAGE  NARROW BODY  LEFT HAND  
0021-76314 COVER  TOP RIGHT REMOTE AC BOX  
0021-76326 PANEL  BOTTOM FEED AC  PHASE I  CENTURA  
0021-76346 COVER  LEAD SCREW HT ESC  
0021-76693 COVER  HOUSING  MTORIZED LIFT  ESC COMPA  
0021-77322 PERFORATED PLATE  
0021-77655 PLATE  MEMBRANE SUPPORT  
0021-78139 SPLICED O-RING 15 75 ID  
0021-78403 WAFER BASE 200MM  
0021-89685  
0021-89703 RING  CLAMP DOME NECK  
0022-77519 FIXTURE  PAD CENTERING  
0030-00243 SCREW COVER #8-32 SKT HD  
0030-09008 HOUSING STORAGE ELEVATOR (CAST)  
0030-09023 TRAY ELEVATOR 150MM  
0030-09026 TRAY ELEVATOR  200MM  
0030-40008 BRACKET  TRAVELING  
0030-70001 BUTTON EMERGENCY OFF SWITCH  
0030-70002 SHOE CASSETTE  GENERIC  
0030-70048 MACHINING MOUNTING BLOCK SLIT VALVE  
0030-70084 HOLDOWN RING  VIEWPORT  
0030-70085 BEZEL MITSUBISHI MONITOR TM  
0030-76001 MACHINED CASTING HSG STORAGE ELEVATOR  
0035-00072 SHIELD TOP  
0035-00074 TOP SHIELD  
0035-18000 HEATER B2 MK2 5000 WATTS  
0040-00028 GAS BOX EC WXZ 8"  
0040-00113 ENCLOSURE INTLK/END PT/HTR PWR 200MM WXZ  
0040-00543 TUBE  MOUNTING  
0040-00555 FRONT SHIELD  
0040-00556 SIDE SHIELD 1  
0040-00557 SIDE SHIELD 2  
0040-00558 SIDE SHIELD 3  
0040-00559 SIDE SHIELD 4  
0040-00560 REAR SHIELD  
0040-01046 SHIELD  THERMAL  DPA  RIGHT SIDE  
0040-01075 BASE CONNECTOR  HEATER  
0040-01134 MOUNTING RING  DOME  200MM DPS E-DTCU  
0040-01239 BASE HEATER GIGA-FILL SACVD  
0040-01543  
0040-01549 COVER 8" PEDESTAL  B101 HTR  S-IMP  SST  
0040-01557 FRONT PANEL W/SIGNAL NBLL CENTURA  
0040-01892 LEFT BLOCK  CLAMP/GAS SPRING  DXZ  FL GE  
0040-02149 HEATER  COMMON 8" LONG SHAFT ALN - HA12  
0040-02194 bbbbL COVER  PUMPING PLATE W GAS SPR  DX  
0040-02408 SHAFT  COOLING TUBE  ALUM  XZZ COMMON HT  
0040-02549 ESC ASSY 150MM FLAT  DUAL ZONE SUPER-E  
0040-02818 BLOCK  MIXING  LID GIGA-FILL SACVD  
0040-03411 MOUNTING PLATE  SIGMA THROTTLE VALVE  
0040-03713 RING MOUNTING DOME ES DTCU POLY DPS  
0040-03733 COVER  ORIENTER/DEGAS  
0040-03897 PLATE  LID  NI PLATED  TIC14 TI 200MM  
0040-04024 PART  
0040-04542 HEATER  WELDMENT 200MM CPR STD CHUCK WXZ  
0040-04697  
0040-04977 LID  CHAMBER TANOX HEATED FEEDTHROUGH  
0040-05489  
0040-05652 COVER  MOTOR PLATE GUARD  
0040-05881 COVER RF WATER BOX SUB-ZERO ESC 1 574" S  
0040-05965 PLATE 5 PHASE MOTOR WXZ  
0040-06241 HTR  
0040-06460 WATLOW BLANKOFF PANEL  
0040-06477 CLAMP RING UPPER  RP  
0040-06711 ESC ANTI-LIFT BRACKET  
0040-06741 BRACKET VAT CONTROLLER  TO PUMP  
0040-09002 CHAMBER  ETCH  
0040-09004 BELLOWS WELDMENT  
0040-09008 FRAME  VAC PORT/SLIT WIN  
0040-09009 BASE LAMP VENT  
0040-09022 HOUSING  
0040-09036 SUPPORT  BUS BAR  
0040-09037 BLADE  125MM/150MM  
0040-09065 COVER PLATE  
0040-09069 CABLE ASSEMBLY  
0040-09094 CHAMBER 200MM  
0040-09095 GAS BOX 200MM